Modeling reactive magnetron sputtering: a survey of different modeling approaches
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Acta Universitatis Sapientiae, Informatica
سال: 2020
ISSN: 2066-7760
DOI: 10.2478/ausi-2020-0008