Дослідження застосувань нанотекстурованого сапфіру як темплету при MOCVD-гетероепітаксії ІІІ-нітридів
نویسندگان
چکیده
منابع مشابه
Characterization of Nanosized Al2O3 Powder Synthesized by Thermal-Assisted MOCVD and Plasma-Assisted MOCVD
Nanosized Al2O3 powder is synthesized by thermal Metal Organic Chemical Vapor Deposition (MOCVD)combined withplasma. The effects of reaction temperature, pressure, Al(CH3)3 (TMA) concentration and...
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A growth model for the low pressure chemical vapor deposition (LPCVD) of polycrystalline ZnO thin films is proposed. This model is based on experimental observations of the surfacemorphology and crystallographic orientations of the layers at different thicknesses and growth temperatures. It is shown that the films preferred orientation evolves from c-axis to aaxis as the growth temperature is i...
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A chemistry-based approach to designing precursors for the deposition of inorganic films requires consideration of the physical properties of the precursor compound (e.g., volatility for transport in the reactor) and its probable decomposition pathways, both in the gas phase and on the surface during growth. We have been using Aerosol-Assisted Chemical Vapor Deposition of tungsten carbonitride ...
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These are model studies whose aim is to obtain information that would allow development of new technology for synthesizing monolayers of Al2O3-C with adjusted microstructure on cemented carbides. The Al2O3-C layer will constitute an intermediate layer on which the outer layer of Al2O3 without carbon is synthesized. The purpose of the intermediate layer is to block the cobalt diffusion to the sy...
متن کاملcharacterization of nanosized al2o3 powder synthesized by thermal-assisted mocvd and plasma-assisted mocvd
nanosized al2o3 powder is synthesized by thermal metal organic chemical vapor deposition (mocvd)combined withplasma. the effects of reaction temperature, pressure, al(ch3)3 (tma) concentration and reactant gases (co2 and o2) on the characteristics of the synthesized al2o3 powders are investigated. the experimental results demonstrate that very fineal2o3 powders with mean particle size of about ...
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ژورنال
عنوان ژورنال: Реєстрація, зберігання і обробка даних
سال: 2018
ISSN: 1560-9189
DOI: 10.35681/1560-9189.2018.20.3.158511