Minimum Detectable Air Velocity by Thermal Flow Sensors
نویسندگان
چکیده
منابع مشابه
Minimum Detectable Air Velocity by Thermal Flow Sensors
Miniaturized thermal flow sensors have opened the doors for a large variety of new applications due to their small size, high sensitivity and low power consumption. Theoretically, very small detection limits of air velocity of some micrometers per second are achievable. However, the superimposed free convection is the main obstacle which prevents reaching these expected limits. Furthermore, exp...
متن کاملRefined Thermal Flow Sensors by Transduction Engineering
Miniaturized flow sensors composed of a thin membrane supporting appropriately positioned heating resistors and temperature sensors were studied by computer-numeric analysis. Significant improvements of the steady-flow transduction characteristics as well as the responses to step-like changes of the dissipated power are feasible by design modifications and new transduction schemes.
متن کاملThermal Flow Micro Sensors'
A review is given on sensors fabricated by silicon micromachining technology using the thermal domain for the measurement of fluid flow. Attention is paid especially to performance and geometry of the sensors. Three basic types of thermal jlow sensors are discussed: anemometers, calorimetric flow sensors and time of flight flow sensors. Anemometers may comprise several heaters and temperature s...
متن کاملThermal Flow Sensors for Harsh Environments
Flow sensing in hostile environments is of increasing interest for applications in the automotive, aerospace, and chemical and resource industries. There are thermal and non-thermal approaches for high-temperature flow measurement. Compared to their non-thermal counterparts, thermal flow sensors have recently attracted a great deal of interest due to the ease of fabrication, lack of moving part...
متن کاملMicromachined Thermal Flow Sensors - A Review
Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Sensors
سال: 2013
ISSN: 1424-8220
DOI: 10.3390/s130810944