Microstructural and Mechanical Characteristics of TiZrAlN Nanocomposite Thin Films by CFUBMS
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چکیده
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Mechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering
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ژورنال
عنوان ژورنال: Journal of the Korean institute of surface engineering
سال: 2007
ISSN: 1225-8024
DOI: 10.5695/jkise.2007.40.1.001