Micromanufacturing of Geometrically and Dimensionally Precise Molecular Single?Crystal Photonic Microresonators via Focused Ion Beam Milling
نویسندگان
چکیده
Highly reproducible manufacturing of organic optical crystals with well-defined geometry and dimension is important to realize industrially relevant all-organic microelectronic nanophotonic components photonic integrated circuits. Here, programmed shape size alteration square-shaped perylene crystal resonators into circular disk rectangular geometries demonstrated using the focused-ion-beam milling technique. The fabricated smaller sized display shape- size-dependent modes. Due generality high reproducibility, this processing technique can be also extended other create suitable for commercial device applications.
منابع مشابه
Imaging Nanophotonic Modes of Microresonators using a Focused Ion Beam.
Optical microresonators have proven powerful in a wide range of applications, including cavity quantum electrodynamics1-3, biosensing4, microfludics5, and cavity optomechanics6-8. Their performance depends critically on the exact distribution of optical energy, confined and shaped by the nanoscale device geometry. Near-field optical probes9 can image this distribution, but the physical probe ne...
متن کاملFocused ion beam milling of gallium phosphide nanostructures for photonic applications
We report on the fabrication of gallium phosphide (GaP) nanowaveguides of controlled dimensions, as small as 0.03 μm and aspect ratio in excess of 20, using focused ion beam (FIB) milling. A known limitation of this fabrication process for photonic applications is the formation of gallium droplets on the surface. We demonstrate a postfabrication step using a pulsed laser to locally oxidize the ...
متن کاملPhotonic crystal structures with ultrahigh aspect ratio in lithium niobate fabricated by focused ion beam milling
Lithium niobate LiNbO3, LN is an important material which is widely applied in fabricating photonic and acoustic devices. However, it is difficult to either wet etch or dry etch LN due to the material’s properties. Here, the authors report novel pattern fabrication based on LN using focused ion beam FIB milling. When an array of small holes is etched, a severe tapering problem is observed as is...
متن کاملFocused ion beam milling of microchannels in lithium niobate.
We present experimental and simulation results for focused ion beam (FIB) milling of microchannels in lithium niobate in this paper. We investigate two different cuts of lithium niobate, Y- and Z-cuts, and observe that the experimental material removal rate in the FIB for both Y-cut and Z-cut samples was 0.3 μm(3)/nC, roughly two times greater than the material removal rate previously reported ...
متن کاملMaskless milling of diamond by a focused oxygen ion beam
Recent advances in focused ion beam technology have enabled high-resolution, maskless nanofabrication using light ions. Studies with light ions to date have, however, focused on milling of materials where sub-surface ion beam damage does not inhibit device performance. Here we report on maskless milling of single crystal diamond using a focused beam of oxygen ions. Material quality is assessed ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Advanced Optical Materials
سال: 2022
ISSN: ['2195-1071']
DOI: https://doi.org/10.1002/adom.202201150