Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

Micro-patterning of NdFeB and SmCo magnet films for integration into Micro- Electro-Mechanical-Systems

The integration of high performance RE-TM (NdFeB and SmCo) hard magnetic films into Micro-Electro-Mechanical-Systems (MEMS) requires their patterning at the micron scale. In this paper we report on the applicability of standard micro-fabrication steps (film deposition onto topographically patterned substrates, wet etching and planarization) to the patterning of 5 μm thick RE-TM films. While NdF...

Micro - Electro - Mechanical - Systems ( Mems )

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Batch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...