Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting
نویسندگان
چکیده
منابع مشابه
Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting
This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it wit...
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ژورنال
عنوان ژورنال: Micro and Nano Systems Letters
سال: 2017
ISSN: 2213-9621
DOI: 10.1186/s40486-017-0054-x