Micro-Electromechanical Systems-based Sensors and Their Applications
نویسندگان
چکیده
منابع مشابه
Micro Electromechanical Sensors: Technology and Applications
Micro Electromechanical Systems (MEMS) have been proved to be outstanding tools for micromachines. The current article is intended to produce an assessment of MEMS used in a wide scale in various spheres, nearly 30 years after their initial development.Conventional sensors are now aptly supported by advanced technologies. Micro Electromechanical Sensors form a class of sensors which are sensiti...
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223 words) .......................................................................................................... 2 INTRODUCTION (758 words) .................................................................................................. 3 A CRITICAL LITERATURE REVIEW (1867 words) .................................................................... 6 SUMMARY AND CONCLUSION (682 words) ......
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ژورنال
عنوان ژورنال: Applied Science and Convergence Technology
سال: 2022
ISSN: ['2288-6559', '1225-8822']
DOI: https://doi.org/10.5757/asct.2022.31.2.40