Micro Electro Mechanical Systems Tilt Sensor Based Convey Expression Identification

Micro - Electro - Mechanical - Systems ( Mems )

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Internet Based Prototyping of Micro-Electro-Mechanical Systems

This paper details preliminary work investigating Internet-based simulation of microsystems. It is in no means exhaustive, and focuses on using mainstream, current web-based technology while highlighting anticipated future directions in relevant internet technology. It proposes a paradigm of automation that limits the information that needs to pass back and forth between a browser-based client ...

Batch Mode Micromanufacturing Based on Micro Electro-discharge Machining and Micro Ultrasonic Machining for Micro Electro Mechanical Systems (mems)

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...