Micro drilled ‘via holes’ in III-V semiconductors
نویسندگان
چکیده
منابع مشابه
Real-time depth measurement for micro-holes drilled by lasers
An optical system based on the confocal principle has been developed for real-time precision measurements of the depth of micro-holes during the laser drilling process. The capability of the measuring system is theoretically predicted by the Gaussian lens formula and experimentally validated to achieve a sensitivity of 0.5 μm. A nanosecond laser system was used to drill holes, and the hole dept...
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ژورنال
عنوان ژورنال: III-Vs Review
سال: 2005
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(05)71168-6