MEMS-actuated metasurface Alvarez lens

Dynamic metasurface lens based on MEMS technology

All-dielectric subwavelength metasurface focusing lens.

We have proposed, designed, manufactured and tested low loss dielectric micro-lenses for infrared (IR) radiation based on a dielectric metamaterial layer. This metamaterial layer was created by patterning a dielectric surface and etching to sub-micron depths. For a proof-of-concept lens demonstration, we have chosen a fine patterned array of nano-pillars with variable diameters. Gradient index ...

A MEMS-Actuated Tunable Microdisk Resonator

A novel tunable microdisk resonator with integrated MEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8dB and a quality factor of 6200.

Electrostatically Actuated 2-dimensional Mems Micromirror

Electrostatically actuated Micro-Electro-MechanicalSystems (MEMS) based micromirror is a fundamental building block for a variety of optical network applications, such as optical wavelength-selective switching, add/drop multiplexing, and optical cross-connecting. The design, analysis and testing of a 2-Dimensional (2D) electrostatically actuated torsional MEMS micromirror is presented in this p...

Modeling an Electrostatically Actuated MEMS Diaphragm Pump

The recent advent of microelectromechanical systems (MEMS) or micro-devices has generated excitement in many diverse fields. In the area of micro-fluidics liquid pumps are highly desirable for fluid transport and atomization. A recent and popular example of this is the inkjet, which self-aspirates ink from a reservoir and then transports it to a chamber for expulsion as a single droplet during ...