Mechanism of pulsed-laser-induced oxidation of titanium films

Pulsed Laser Deposition of Epitaxial Titanium Diboride Thin Films

Epitaxial titanium diboride thin films have been deposited on sapphire substrates by Pulsed Laser Ablation technique. Structural properties of the films have been studied during the growth by Reflection High Energy Electron Diffraction (RHEED) and ex-situ by means of X-ray diffraction techniques; both kinds of measurements indicate a good crystallographic orientation of the TiB 2 film both in p...

Local electric-field-induced oxidation of titanium nitride films

Nanometer-scale patterning of TiN films grown on SiO2 /Si(001) has been demonstrated using the local electric-field-induced oxidation process with a conductive-probe atomic force microscope. The chemical composition of the modified TiN region was determined by micro-Auger electron spectroscopy and was found to consist of Ti, some trace amount of N, and O, suggesting the formation of titanium ox...

Investigation of pulsed laser induced dewetting in nanoscopic metal films

Hydrodynamic pattern formation (PF) and dewetting resulting from pulsed laser induced melting of nanoscopic metal films have been used to create spatially ordered metal nanoparticle arrays with monomodal size distribution on SiO 2 /Si substrates. PF was investigated for film thickness h ≤ 7 nm < laser absorption depth ∼ 11 nm and different sets of laser parameters, including energy density E an...

Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition

We report a study on the biocompatibility vs. thickness in the case of titanium nitride (TiN) films synthesized on 410 medical grade stainless steel substrates by pulsed laser deposition. The films were grown in a nitrogen atmosphere, and their in vitro cytotoxicity was assessed according to ISO 10993-5 [1]. Extensive physical-chemical analyses have been carried out on the deposited structures ...

Structure and mechanical properties of titanium nitride thin films grown by reac - tive pulsed laser deposition