Mechanical tuning of two-dimensional photonic crystal cavity by micro Electro mechanical flexures

Mechanical tuning of two-dimensional photonic crystal cavity by micro Electro mechanical flexures

A nano-displacement sensing method for micro-opto-electro-mechanical-systems (MOEMS) is proposed. The method is based on a square attice photonic crystal (PC) made of dielectric silicon posts, mounted on a micro mechanical flexure. The flexure is fixed at one end and is free to ove at the other, to enable elastic deformations that, by being transferred to the photonic crystal array, modify its ...

Nano-mechanical tuning and imaging of a photonic crystal micro-cavity resonance.

We show that nano-mechanical interaction using atomic force microscopy (AFM) can be used to map out mode-patterns of an optical micro-resonator with high spatial accuracy. Furthermore we demonstrate how the Q-factor and center wavelength of such resonances can be sensitively modified by both horizontal and vertical displacement of an AFM tip consisting of either Si(3)N(4) or Si material. With a...

Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity.

We fabricate and characterize a microscale silicon opto-electromechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining...

Micro - Electro - Mechanical - Systems ( Mems )

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...