Measurement of (p,p) elastic differential cross sections for 17O in the 0.6–2 MeV range at 165°

17O(p,p)17O elastic scattering cross sections were measured for the first time, on INSP SAFIR platform in Paris, using thin silica films prepared by thermal oxidation of Si under 17O2. The 17O content film was determined a combination ellipsometry and IBA measurements. yield elastically scattered protons from corresponding peak Elastic Backscattering spectra, with underlying signal reduced channeling incident beam silicon substrate. section systematic uncertainty about 14%. consists resonant structures superimposed smoothly varying component that increases 1.2 times Rutherford at 600 keV to 3 2 MeV. A resonance 1230 shows promise proton depth profiling, especially large backscattering angles. is available IBANDL (www-nds.iaea.org/ibandl/).