Magnification inferred curvature for real-time curvature monitoring

نویسندگان

چکیده

Abstract The in situ and real-time measurement of curvature changes optically reflecting surfaces is a key element to better control bottom-up fabrication processes the semiconductor industry, but also follow or adjust mirror deformations during use for space optics industries. Despite progresses made last two decades thanks laser deflectometry-based techniques, community lacks an instrument, easy use, robust tough environments easily compatible with large range processes. We describe here new method, called magnification inferred (MIC), based on determination factor virtual image size known object created by curved surface (the substrate) acting as spherical mirror. optical formalism, design, proof concept are presented. precision, accuracy, advantages MIC method illustrated from selected examples taken growth monitoring compared state-of-the-art instruments.

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ژورنال

عنوان ژورنال: Scientific Reports

سال: 2021

ISSN: ['2045-2322']

DOI: https://doi.org/10.1038/s41598-021-88722-6