Magnetic Levitation Transport System for Extremly High Vacuum.

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

development of technical and economical models for widespread application of magnetic levitation system in public transport

magnetic levitation (maglev) is amongst the most advanced technologies that are available to the transportation industries. it has already been noticed by decision makers in many countries around the globe. contrary to such high levels of interest, there are no practical algorithms available to the engineers and/or managers to assist them in analyzing economics of the maglev systems. therefore,...

متن کامل

High-precision magnetic levitation stage for photolithography

In this paper, we present a high-precision magnetic levitation (maglev) stage for photolithography in semiconductor manufacturing. This stage is the world’s first maglev stage that provides fine six-degree-of-freedom motion controls and realizes large (50 mm 3 50 mm) planar motions with only a single magnetically levitated moving part. The key element of this stage is a linear motor capable of ...

متن کامل

Optimization of Magnetic Levitation System

In magnetically levitated system in certain applications like magnetically levitated train or bearingless motors the distance between the magnet and the levitated object has to be constant. The nonlinear system in such cases can be linearized and transfer function of the system is obtained. But a proper controller is required to manipulate the current through the magnet coil. The simplest contr...

متن کامل

A High-Precision Positioning System Using Magnetic Levitation∗

High accuracy positioning stages with multiple degrees-of-freedom are ubiquitous in industrial manufacturing. Examples include probing and inspection systems, disk drive head assembly systems, and photolithographic positioning stages (microsteppers) in semiconductor manufacturing. Microsteppers are typically made of a lower-stage that actuates large high-speed movements and an upper-stage that ...

متن کامل

Tuned Parameters of PID for Optimization of Losses in Magnetic Levitation System

In this paper a new method is proposed for determining PID controller parameters in order to decrease losses in levitation system of magnetic trains. It is assumed that this system is a hybrid system and it consists of electric and permanent magnet. For optimization of losses initially AC losses of magnetic levitation system are calculated. Linear model of levitation system as well as modeling ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: SHINKU

سال: 1993

ISSN: 0559-8516,1880-9413

DOI: 10.3131/jvsj.36.253