Machine learning in scanning transmission electron microscopy

15. Scanning Transmission Electron Microscopy

Elemental mapping in scanning transmission electron microscopy

We discuss atomic resolution chemical mapping in scanning transmission electron microscopy (STEM) based on core-loss electron energy loss spectroscopy (EELS) and also on energy dispersive X-ray (EDX) imaging. Chemical mapping using EELS can yield counterintuitive results which, however, can be understood using first principles calculations. Experimental chemical maps based on EDX bear out the t...

Scanning transmission low-energy electron microscopy

We discuss an extension to the transmission mode of the cathode-lens-equipped scanning electron microscope, enabling operation down to the lowest energies of electrons. Penetration of electrons through free-standing ultrathin films is examined along the full energy scale, and the contribution of the secondary electrons (SEs), released near the bottom surface of the sample, is shown, enhancing t...

Z-contrast Scanning Transmission Electron Microscopy

Scanning Transmission Electron Microscopy for Nanostructure Characterization