Low-energy Se ion implantation in MoS2 monolayers

Doping of carbon nanotubes using low energy ion implantation.

Carbon nanotubes (CNTs) were implanted with thermally decomposed oxygen (O2+) and nitrogen (N2+) ions at an acceleration voltage of 20 V. With a low dose of oxygen ions, the CNT-FET exhibited p-type behaviors with substantial changes in threshold voltage and in the slope of the source-drain current (l(sd)). However, at high dosages, the device exhibited metallic behaviors. After nitrogen doping...

LOW-ENERGY-ION ENHANCED DIFFUSION AT THE SURFACE OF METALS

Radiation enhanced diffusion at the surface of metals has been observed and studied for low-energy nitrogen ions at the surface of copper. The displacement of the target atoms during irradiation creates vacancies and other defects near the surface, thus enhancing the diffusion of implanted materials toward the surface and also into the solid. The mechanism has been studied here by a specia...

A tight-binding model for MoS2 monolayers.

We propose an accurate tight-binding parametrization for the band structure of MoS2 monolayers near the main energy gap. We introduce a generic and straightforward derivation for the band energies equations that could be employed for other monolayer dichalcogenides. A parametrization that includes spin-orbit coupling is also provided. The proposed set of model parameters reproduce both the corr...

Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition

Donor activation and damage in Si–SiO2 from low-dose, low-energy ion implantation studied via electrical transport in MOSFETs

Using silicon MOSFETs with thin (5 nm) thermally grown SiO2 gate dielectrics, we characterize the density of electrically active traps at low temperature after 16 keV phosphorus ion implantation through the oxide. We find that, after rapid thermal annealing at 1000 ◦C for 5 s, each implanted P ion contributes an additional 0.08 ± 0.03 electrically active traps, whilst no increase in the number ...