Low-emission carbon coatings for control grids of high power vacuum devices
نویسندگان
چکیده
The influence of the dipole polarization carbon film coatings on their secondary electron emission has been studied. It is shown that plasma fluorination with low specific surface resistance obtained in microwave low-pressure ethanol vapor increases work function by 0.6 eV and reduces more than a factor two. results can be used to obtain collectors anti-emission grid electrodes high-power electrovacuum devices sub-terahertz ranges. Keywords: plasma, film, fluorination, function, emission.
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ژورنال
عنوان ژورنال: Pis?ma v Žurnal tehni?eskoj fiziki
سال: 2023
ISSN: ['1726-7471', '0320-0116']
DOI: https://doi.org/10.21883/tpl.2023.03.55680.19227