Local-Loading Effects for Pure-Boron-Layer Chemical-Vapor Deposition
نویسندگان
چکیده
منابع مشابه
Synthesis of few-layer hexagonal boron nitride thin film by chemical vapor deposition.
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ژورنال
عنوان ژورنال: ECS Transactions
سال: 2013
ISSN: 1938-6737,1938-5862
DOI: 10.1149/05004.0333ecst