Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition
نویسندگان
چکیده
منابع مشابه
Large flexibility of high aspect ratio carbon nanostructures fabricated by electron-beam-induced deposition.
The mechanical properties of free-standing electron beam deposited amorphous carbon structures have been studied using atomic force microscopy. The fabricated carbon blades are found to be extraordinarily flexible, capable of undergoing vertical deflection up to ∼ 75% of their total length without inelastic deformation. The elastic bending modulus of these structures was calculated to be 28 ± 1...
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BACKGROUND Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron beam. After 20 years of continuous development FEBID has reached a stage at which this technique is ...
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Electron beam deposition ~EBD! provides an inexpensive way to fabricate nanostructures of various materials in a scanning electron microscope ~SEM!. However, the purity of metals deposited from an organometallic precursor gas is impaired by simultaneously deposited carbon coming both from the organometallic molecule and the residual contamination gas in the SEM chamber. We discuss carbon-contam...
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The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as thermodynamics calculations support the idea that electrons can remove chlorine from PtCl2 structure...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2010
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.3431351