Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves
نویسندگان
چکیده
منابع مشابه
Liquid Encapsulation in Parylene Microstructures Using Integrated Annular-Plate Stiction Valves
We report the design, fabrication and characterization of micromachined Parylene structures for self-sealing liquid encapsulation applications. Automatic sealing is enabled through the use of an integrated annular-plate stiction valve which greatly reduces device footprint over in-plane configurations. We achieve automatic wafer-level liquid entrapment without using adhesives or processing at e...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2011
ISSN: 2072-666X
DOI: 10.3390/mi2030356