Leveling of Superfilled Damascene Cu Film Using Two-Step Electrodeposition
نویسندگان
چکیده
منابع مشابه
Electrodeposition of Thin Film Cu-Zn Shape Memory Alloys
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ژورنال
عنوان ژورنال: Electrochemical and Solid-State Letters
سال: 2006
ISSN: 1099-0062,1944-8775
DOI: 10.1149/1.2139976