Laser Induced Backside Wet Etching: Mechanisms and Fabrication of Micro-Optical Elements
نویسندگان
چکیده
منابع مشابه
Surface Micro-Structuring of Silica Glass by Laser-Induced Backside Wet Etching with ns-Pulsed UV Laser at a High Repetition Rate
Surface micro-structuring of silica glass plates was performed by using laser-induced backside wet etching (LIBWE) upon irradiation with a single-mode laser beam from a diode-pumped solidstate UV laser at 266 nm. We have succeeded in a well-defined micro-pattern formation without debris and microcrack formations around the etched area on the basis of galvanometer-based point scanning system wit...
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Article history: Received 29 March 2016 Received in revised form 7 June 2016 Accepted 20 June 2016 Available online 21 June 2016 In this work we demonstrate a fabrication process for three-dimensional (3D) container, which is composed of inverted pyramidal pit (IPP) and a capwith nanosized opening fabricated by combining laser interference lithography and anisotropic wet etching processes. The ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2007
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/59/1/113