Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
نویسندگان
چکیده
منابع مشابه
Large-scale synthesis of uniform hexagonal boron nitride films by plasma-enhanced atomic layer deposition
Hexagonal boron nitride (h-BN) has been previously manufactured using mechanical exfoliation and chemical vapor deposition methods, which make the large-scale synthesis of uniform h-BN very challenging. In this study, we produced highly uniform and scalable h-BN films by plasma-enhanced atomic layer deposition, which were characterized by various techniques including atomic force microscopy, tr...
متن کاملScalable synthesis of uniform few-layer hexagonal boron nitride dielectric films.
Two-dimensional or ultrathin layered materials are attracting broad interest in both fundamental science and applications. While exfoliation can provide high-quality single- and few-layer flakes with nanometer to micrometer size, the development of wafer-scale synthesis methods is important for realizing the full potential of ultrathin layered materials. Here we demonstrate the growth of high q...
متن کاملLarge-scale synthesis and functionalization of hexagonal boron nitride nanosheets.
A simple and inexpensive method to functionalize hexagonal boron nitride (hBN) was achieved by using an acid mixture of phosphoric and sulphuric acid. This functionalization induced the exfoliation of the layered structure of hBN into monolayer to few-layer sheets where the sizes of the sheets were dependent on the parent hBN powder used. Exfoliated hBN was shown to be stable in solvents such a...
متن کاملSynthesis of few-layer hexagonal boron nitride thin film by chemical vapor deposition.
In this contribution we demonstrate a method of synthesizing a hexagonal boron nitride (h-BN) thin film by ambient pressure chemical vapor deposition on polycrystalline Ni films. Depending on the growth conditions, the thickness of the obtained h-BN film is between ∼5 and 50 nm. The h-BN grows continuously on the entire Ni surface and the region with uniform thickness can be up to 20 μm in late...
متن کاملSYNTHESIS AND FUNCTIONALIZATION OF ATOMIC LAYER BORON NITRIDE NANOSHEETS FOR ADVANCED MATERIAL APPLICATIONS Besides graphene, hexagonal boron nitride nanosheets
SYNTHESIS AND FUNCTIONALIZATION OF ATOMIC LAYER BORON NITRIDE NANOSHEETS FOR ADVANCED MATERIAL APPLICATIONS Report Title Besides graphene, hexagonal boron nitride nanosheets (BNNSs) are playing an excellent role for the next generation of 2-dimentional (2D) functional nanomaterials. Due to the similar lattice parameter and identical crystalline structure to that of graphene, BNNSs are often kno...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Scientific Reports
سال: 2017
ISSN: 2045-2322
DOI: 10.1038/srep40091