Laboratory equipment with remote access for thin film deposition in vacuum
نویسندگان
چکیده
منابع مشابه
Energetic Deposition of Niobium Thin Film in Vacuum
(Abstract) Niobium thin films are expected to be free of solid inclusions commonly seen in solid niobium. For particle accelerators, niobium thin film has the potential to replace the solid niobium in the making of the accelerating structures. In order to understand and improve the superconducting performance of niobium thin films at cryogenic temperature, an energetic vacuum deposition system ...
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Deposition process for thin insulator used in polysilicon gate dielectric of thin film transistors are optimized. Silane and N2O plasma are used to form SiO2 layers at temperatures below 150 ºC. The deposition conditions as well as system operating parameters such as pressure, temperature, gas flow ratios, total flow rate and plasma power are also studied and their effects are discussed. The p...
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Electrospraying utilises electrical forces for liquid atomisation. Droplets obtained by this method are highly charged to a fraction of the Rayleigh limit. The advantage of electrospraying is that the droplets can be extremely small, down to the order of 10’s nanometres, and the charge and size of the droplets can be controlled to some extent be electrical means. Motion of the charged droplets ...
متن کاملReal Time Evaluation of Vacuum Process for Thin Film Aluminum Deposition
The chemical species in gas phase and on the surface of aluminum precursor (boro-hydride trimethylamine (ABHTMA)) for aluminum deposition process with the vacuum level and the hot wall temperature were studied using two kinds of Fourier transform infrared (FT-IR) spectroscopes which was installed at the end of the chamber. The absorbance of Al-H, B-H, C-H and C-N stretching features of the chem...
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Air samples were collected at a highway intersection, coastal location and suburban area in Taichung, Taiwan for the characterization of nitrate containing particulates (NCPs) in dry deposition from October 2002 to February 2003. Sampling was accomplished with a surrogate surface technique in non-raining days. Collecting tapes were precoated with nitron (C20H16N4) in a vacuum evaporator control...
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ژورنال
عنوان ژورنال: Nanoindustry Russia
سال: 2017
ISSN: 1993-8578
DOI: 10.22184/1993-8578.2017.77.6.76.82