Ion Source Technlogy to Produce Large Area, High Current, and Uniform Ion Beams for Industrial Applications.
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Kakuyūgō kenkyū
سال: 1992
ISSN: 0451-2375,1884-9571
DOI: 10.1585/jspf1958.67.399