Investigation of silicon nanoparticles produced by centrifuge chemical vapor deposition for applications in therapy and diagnostics

Porous silicon (PSi) is a biocompatible and biodegradable material, which can be utilized in biomedical applications. It has several favorable properties, makes it an excellent material for building engineered nanosystems drug delivery diagnostic purposes. One significant hurdle commercial applications of PSi the lack industrial scale production nanosized particles. Here, we report novel two-step method nanoparticles. The based on centrifuge chemical vapor deposition (cCVD) elemental reactor followed by electrochemical post-processing to porous Physical biocompatibility vivo biodistribution cCVD produced nanoparticles were investigated compared conventionally from wafers pulse etching. Our results demonstrate that provides with comparable physical biological quality conventional method. This may circumvent limitations such as requirements high purity monocrystalline substrates starting losses during top-down milling process pulse-etched films However, electroless etching required porosification cCVD-produced limited control over pore size, but amenable scaling requirements.