Investigation of N in Ammonium-bearing Silicates with Electron Probe Microanalysis (EPMA)
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چکیده
منابع مشابه
Electron Probe Microanalysis (EPMA)
An electron microprobe is an electron microscope designed for the non-destructive x-ray microanalysis and imaging of solid materials. It is essentially a hybrid instrument combining the capabilities of both the scanning electron microscope (SEM) and an x-ray fluorescence spectrometer (XRF), with the added features of fine-spot focusing (~ 1 micrometer), optical microscope imaging, and precision...
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EPMA has been applied to electron beam evaporated and r.f. sputtered layers of about 200 tig/cm. This includes analysis of trapped argon and oxygen ranging from 0.2 to 10 wt%. For primary electron energies of 5 to 15 keV depth range of X-ray emission may be predicted with an accuracy of ± 10 nm. Errors of quantitative analysis are discussed for various correction models and should not exceed 3....
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2020
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927620013203