InGaAs-OI Substrate Fabrication on a 300 mm Wafer
نویسندگان
چکیده
منابع مشابه
MM WAFER FABRICATION LINE SIMULATION MODEL Sameer
The importance of semiconductor wafer fabrication has been increasing steadily over the past decade. Wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. It involves the processing of wafers of silicon in order to build up layers and patterns of metal and wafer material. Many operations have to be performed in a clean room environment...
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ژورنال
عنوان ژورنال: Journal of Low Power Electronics and Applications
سال: 2016
ISSN: 2079-9268
DOI: 10.3390/jlpea6040019