Indirect evidence for Lévy walks in squeeze film damping
نویسندگان
چکیده
منابع مشابه
Squeeze-film damping of flexible microcantilevers
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and flexible microcantilevers affected by squeeze-film damping at low ambient pressures. Our approach extends recent continuum gas damping models (Veijola 2004 J. Micromech. Microeng. 14 1109–18, Gallis and Torczynski 2004 J. Microelectromech. Syst. 13 653–9), which were originally derived for a rigid ...
متن کاملUncertainty quantification models for micro-scale squeeze-film damping
Two squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap size and the ambient pressure. Modeling of gas damping has become a subject of increased interest in recent years due to its importance in micro-electro-mechanical systems (MEMS). In addition to the need for gas damping models for design of MEMS with movable micro-structures, knowledge of paramete...
متن کاملSqueeze Film Air Damping in Tapping Mode Atomic Force Microscopy
In dynamic plowing lithography, the sample surface is indented using a vibrating tip in tapping mode atomic force microscopy. During writing, the gap between the cantilever and the sample surface is very small, usually on the order of micrometers. High vibration frequency and small distance induce squeeze film air damping from the air in the gap. This damping can cause variations in the cantile...
متن کاملH Squeeze Film damping in Microsystems CNF Project
Figure 1: Schematic experimental set up. Squeezed film damping (SFD) is a common phenomenon that occurs in many microdevices when a surface moves normally to another solid surface in close proximity. In microelectromechanical systems (MEMS), SFD is often one of the largest sources of parasitic losses. Therefore, an accurate evaluation of hydrodynamic forces due to the SFD effect is critical in ...
متن کاملNonlinear Effects in Squeeze Film Gas Damping on Microbeams
We consider squeeze film gas damping during microbeam motion away and toward a substrate as occurs during opening and closing of RF switches and other MEMS devices. The numerical solution of the gas damping problem in two-dimensional geometries is obtained based on the Boltzmann-ESBGK equation. The difference in damping force between downward and upward moving beams is shown to vary from as lit...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Physical Review D
سال: 2010
ISSN: 1550-7998,1550-2368
DOI: 10.1103/physrevd.81.123008