Improvement on the Target Structure in a Cylindrical Magnetron Sputtering Apparatus.

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Decorative Titanium Nitride Colored Coatings on Bell-Metal by Reactive Cylindrical Magnetron Sputtering

The transition metal nitrides like titanium nitride exhibit very interesting color variation properties depending on the different plasma deposition conditions using cylindrical magnetron sputtering method. It is found in this deposition study that nitrogen partial pressure in the reactive gas discharge environment plays a significant role on the color variation of the film coatings on bell-met...

متن کامل

the effects of changing roughness on the flow structure in the bends

flow in natural river bends is a complex and turbulent phenomenon which affects the scour and sedimentations and causes an irregular bed topography on the bed. for the reason, the flow hydralics and the parameters which affect the flow to be studied and understand. in this study the effect of bed and wall roughness using the software fluent discussed in a sharp 90-degree flume bend with 40.3cm ...

Deposition of Al/Cu Multilayer By Double Targets Cylindrical DC Magnetron Sputtering System

A cylindrical direct current magnetron sputtering coater with two targets for deposition of multilayer thin films and cermet solar selective surfaces has been constructed. The substrate holder was able to rotate around the target for obtaining the uniform layer and separated multilayer phases. The Al/ Cu multilayer film was deposited on the glass substrate at the following conditions: Working g...

متن کامل

the effect of a selfregulatory approach on the improvement of efl learners listening comprehension

تاثیر آموزش مهارت خود محوری بر روی ارتقاء مهارت شنیداری زبان آموزان هدف این پژوهش بررسی عوامل موثر در ارتقا مهارت شنیداری زبان آموزان ایرانی بود. در مرحله اول این تحقیق پژوهشگر پس از انجام مصاحبه نود زبان آموز را با استفاده از تست ایلتس انتخاب شدند. برای بررسی عوامل عوامل موثر در ارتقا مهارت شنیداری زبان آموزان ایرانی از دو نوع فیلم ویرایش شده و ویرایش نشده استفاده گردید.برای انجام تح...

A New Sputtering Apparatus

The writer, in sputtering a large number of mirrors, has found that the apparatus and methods to be described have several advantages, particularly where very large and perfect mirrors are desired. The accompanying diagram will be self explanatory, and the dimensions given have been found convenient for mirrors up to 10 cm diameter. The apparatus has been designed to avoid the use of any grease...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: SHINKU

سال: 1995

ISSN: 0559-8516,1880-9413

DOI: 10.3131/jvsj.38.714