Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning
نویسندگان
چکیده
منابع مشابه
Improved Capacitive Detection Method for Coriolis Mass Flow Sensors Enabling Range/sensitivity Tuning
We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for three times increased sensitivity. Capacitive Coriolis mass flow sensors are normally read out by two electrodes that measure the ratio between the actuation mode and the Coriolis mode, which is induced by the mass flow. This ratio results in a phase shift between the two electrodes. By adding tw...
متن کاملA Novel Capacitive Detection Principle for Coriolis Mass Flow SensorsEnabling Range/Sensitivity Tuning
We report on a novel capacitive detection principle for Coriolis mass flow sensors which allows for one order of magnitude increased sensitivity. The detection principle consists of two pairs of comb-structures: one pair produces two signals with a phase shift directly dependent on the mass flow, the other pair is used to cancel the actuation signal. This results in larger phase shifts for the ...
متن کاملTuning a Parallel Segmented Flow Column and Enabling Multiplexed Detection.
Active flow technology (AFT) is new form of column technology that was designed to overcome flow heterogeneity to increase separation performance in terms of efficiency and sensitivity and to enable multiplexed detection. This form of AFT uses a parallel segmented flow (PSF) column. A PSF column outlet end-fitting consists of 2 or 4 ports, which can be multiplexed to connect up to 4 detectors. ...
متن کاملMicro Coriolis Mass Flow Sensor for Chemical Micropropulsion Systems
We have designed a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems [1]. The sensor measures mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterization of the micro thruster system in a simulated space v...
متن کاملA Mass Conservative Method for Numerical Modeling of Axisymmetric flow
In this paper, the cell-centered finite volume method (CC-FVM) has been presented to simulate the axisymmetric radial flow toward a pumping well. The model is applied to the unstructured triangular grids which allows to simulate inhomogeneous and complex-shaped domains. Due to the non-orthogonality of the irregular grids, the multipoint flux approximation (MPFA) methods are used to discretize t...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2016
ISSN: 0167-9317
DOI: 10.1016/j.mee.2016.01.029