Impedance-matched high-overtone bulk acoustic resonator
نویسندگان
چکیده
We demonstrated a nearly impedance-matched high-overtone bulk acoustic resonator (HBAR) operating at super high frequency ranges using an epitaxial AlN piezoelectric layer directly grown on conductive SiC cavity substrate with no metal insertion. The small impedance mismatch was verified from the variation in free spectral range (FSR); experimentally obtained FSR spectra were greatly reproduced Mason model. Broadband phonon modes up to K-band (26.5 GHz) achieved thickness of 200 nm. figure merit [Formula: see text] 10 GHz also obtained. Our high-quality HBAR will enable development microwave signal processing devices for 5G and future 6G communication systems, such as low-phase noise oscillators filters, well research high-frequency systems hybridized electric, optical, magnetic systems.
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2023
ISSN: ['1520-8842', '0003-6951', '1077-3118']
DOI: https://doi.org/10.1063/5.0141405