Hydrogenation of sputtered ZnO:Al layers for double side poly-Si/SiO_x solar cells

This work presents the development and application of innovative sustainable transparent conductive oxide (TCO) materials for contacting polysilicon (poly-Si) on (SiO x ) stacks used as passivating contacts in solar cell devices. Adding hydrogen into ZnO:Al (AZO) layers deposited by magnetron sputtering potentially leads to a twofold positive effect. First, it brings atoms layers, which can enhance both electrical optical material properties TCO. Second, significantly improve performances, fixing dangling bonds at SiO /substrate interface bulk defects. In situ ex hydrogenation processes have been compared those multiple aspects with investigation about anneals 350 °C. AZO successfully integrated front side complete cells featuring poly-Si/SiO -based contacts, leading record conversion efficiency 22.4% AZO. The results show that using instead an indium based TCO is suitable passivated high temperature route. Thus, increases credibility towards large-scale deployments TCO-based silicon terms cost resources.