Hybrid neural lumped element approach in inverse modeling of RF MEMS switches
نویسندگان
چکیده
منابع مشابه
Modeling and Fabrication of RF MEMS Switches
MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...
متن کاملRF MEMS Switches
An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.
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Mechanical modeling of RF MEMS switches is important for performance optimization and device reliability. 1-D, 2-D, and 3-D linear analytical models have been proposed to analyze the electrostatic pull-in of a fixed-fixed beam at small deflection. However, most RF MEMS switch structures work at large deflection range. In this paper, 1-D, 2-D, and 3-D nonlinear analytical models suitable for lar...
متن کامل3-D Computational Modeling of RF MEMS Switches
Young's modulus and residual stress state of freestanding thin membranes are characterized in this work by means of wafer level experimental techniques. RF MEMS Switches manufactured by Raytheon Systems Co. are investigated using a new method that combines a Membrane Deflection Experiment (MDE) and numerical simulations. It is found that the thin aluminum alloy membranes used in the RF MEMS dev...
متن کاملElectromechanical Modeling and Simulation of RF MEMS Switches
The design of RF MEMS switches involves several disciplines: mechanics, materials science and electrical engineering. While significant progress has been made in the RF design of the switches, mechanical and material studies are required for mass commercialization of reliable devices. Senturia and co-workers at MIT have presented a closed form solution to describe the electromechanical behavior...
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ژورنال
عنوان ژورنال: Facta universitatis - series: Electronics and Energetics
سال: 2020
ISSN: 0353-3670,2217-5997
DOI: 10.2298/fuee2001027c