High-Temperature SAW Resonator Sensors: Electrode Design Specifics
نویسندگان
چکیده
منابع مشابه
Novel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors
In order to develop a film electrode for the surface acoustic wave (SAW) devices working in high temperature, harsh environments, novel AlN/Pt/ZnO multilayers were prepared using pulsed laser deposition (PLD) systems on langasite (LGS) substrates. The AlN film was used as a protective layer and the ZnO buffer layer was introduced to improve the crystal quality of Pt films. The results show that...
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ژورنال
عنوان ژورنال: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
سال: 2018
ISSN: 0885-3010,1525-8955
DOI: 10.1109/tuffc.2018.2797093