High speed interferometric ellipsometer
نویسندگان
چکیده
منابع مشابه
Ellipsometer nulling: convergence and speed.
The process of nulling in ellipsometry is studied by a graphical presentation using the trajectories of two significant polarization states in the complex plane, (XPC) and (XSA). These states are determined by (1) the polarizer and compensator ((XPC)) and (2) the specimen and the analyzer ((XSA)) in the polarizer-compensator-specimen-analyzer ellipsometer arrangement. As the azimuth angles of t...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2008
ISSN: 1094-4087
DOI: 10.1364/oe.16.007778