High Reflectance Coatings
نویسندگان
چکیده
منابع مشابه
High reflectance ta-C coatings in the extreme ultraviolet.
The extreme ultraviolet (EUV) reflectance of amorphous tetrahedrally coordinated carbon films (ta-C) prepared by filtered cathodic vacuum arc was measured in the 30-188-nm range at near normal incidence. The measured reflectance of films grown with average ion energies in the ~70-140-eV range was significantly larger than the reflectance of a C film grown with average ion energy of ~20 eV and o...
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ژورنال
عنوان ژورنال: IEEE Transactions on Nuclear Science
سال: 1966
ISSN: 0018-9499
DOI: 10.1109/tns.1966.4324038