HIGH-QUALITY TEMPERATURE SENSORS ON THE SILICON p-n-JUNCTION BASIS
نویسندگان
چکیده
منابع مشابه
Offset stable piezoresistive high-temperature pressure sensors based on silicon
The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason a silicon-based pressure sensor with an application temperature ranging up to 300 C and the associated manufacturing technology was developed. With ...
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ژورنال
عنوان ژورنال: Sensor Electronics and Microsystem Technologies
سال: 2014
ISSN: 2415-3508,1815-7459
DOI: 10.18524/1815-7459.2006.3.112546