High-Q MEMS Resonators for Laser Beam Scanning Displays
نویسندگان
چکیده
منابع مشابه
High-Q MEMS Resonators for Laser Beam Scanning Displays
This paper reports on design, fabrication and characterization of high-Q MEMS resonators to be used in optical applications like laser displays and LIDAR range sensors. Stacked vertical comb drives for electrostatic actuation of single-axis scanners and biaxial MEMS mirrors were realized in a dual layer polysilicon SOI process. High Q-factors up to 145,000 have been achieved applying wafer leve...
متن کاملHigh-Q Low-Impedance MEMS Resonators
Permission to make digital or hard copies of all or part of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. To copy otherwise, to republish, to post on servers or to redistribute to lists, requires prior specific permission....
متن کاملSuppression of thermoelastic damping in MEMS beam resonators by piezoresistivity
Microelectronic mechanical (MEM) beam resonators with high quality factors are always preferred in practical applications. As one of the damping sources, thermoelastic damping (TED) caused by irreversible heat flows is usually considered as an upper limit of the overall damping effect. A new method is proposed in this work to compensate TED by taking advantage of the piezoresistive effect. Such...
متن کاملMEMS-based adaptive optics scanning laser ophthalmoscopy.
We have developed a compact, robust adaptive optics (AO) scanning laser ophthalmoscope using a microelectromechanical (MEMS) deformable mirror (DM). Facilitated with a Shack-Hartmann wavefront sensor, the MEMS-DM-based AO operates a closed-loop modal wave aberration correction for the human eye and reduces wave aberrations in most eyes to below 0.1 microm rms. Lateral resolution is enhanced, an...
متن کاملHigh Speed UV Laser Beam Scanning by Polygon Mirror
Since the stereolithograpy system appeared on the market, various rapid prototyping machines based on the layer laminated manufacturing process have emerged one after the other, the range of applications of which is classified according to their features. Of these, stereolithogrraphy methods which make use ofphotocurable resin as material and laser beam as processing tools are gradually being e...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Micromachines
سال: 2012
ISSN: 2072-666X
DOI: 10.3390/mi3020509