High Precision Measurement of 3D Profile Using Confocal Differential Heterodyne Interferometer
نویسندگان
چکیده
منابع مشابه
Modeling and Analysis of Phase Fluctuation in a High-Precision Roll Angle Measurement Based on a Heterodyne Interferometer
Heterodyne interferometry is a high-precision method applied in roll angle measurements. Phase metering is essential for high precision. During a high-precision measurement, a phase fluctuation appears even when the roll angle does not vary, which has never been analyzed before. Herein, the reason for the phase fluctuation is revealed, which results from the frequency-difference fluctuation and...
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ژورنال
عنوان ژورنال: Journal of the Optical Society of Korea
سال: 2005
ISSN: 1226-4776
DOI: 10.3807/josk.2005.9.1.022