High‐ <i>Q</i> Thin‐Film Lithium Niobate Microrings Fabricated with Wet Etching (Adv. Mater. 3/2023)
نویسندگان
چکیده
Lithium Niobate Microrings In article number 2208113, Rongjin Zhuang, Yang Li, and co-workers develop a wet-etching method for thin film lithium niobate (TFLN), leading to the fabrication of microrings with an intrinsic quality factor over 9 million. This features high throughput, reproducibility, low cost in etching TFLN, showing potential boost mass production integrated TFLN devices fidelity affordability dramatically.
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ژورنال
عنوان ژورنال: Advanced Materials
سال: 2023
ISSN: ['1521-4095', '0935-9648']
DOI: https://doi.org/10.1002/adma.202370015