High-aspect ratio submicrometer needles for intracellular applications
نویسندگان
چکیده
منابع مشابه
High-aspect ratio submicrometer needles for intracellular applications
A processing technology is presented to produce high-aspect ratio submicrometer silicon needles suited for intracellular interfacing with living cells. Pillars are created using deep reactive ion etching, and the sharpening of the pillars is achieved by reactive ion etching. A simple polyimide-based micro-fabrication approach was developed to integrate the silicon needles with a larger silicon ...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2003
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/13/4/315