High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator
نویسندگان
چکیده
منابع مشابه
High Accuracy MEMS Pressure Sensor Based on Quartz Crystal Resonator
Beijing Research Institute of Telemetry, Beijing 100000, China; [email protected] (C.Z.); [email protected] (D.X.H.); [email protected] (X.F.J.); [email protected] (S.M.Z.); [email protected] (J.B.Z.); [email protected] (M.M.W.); [email protected] (W.B.L.); [email protected] (Y.B.G.) * Correspondence: [email protected]; Tel.: +86-10-6819-8271 † Presented at the Eurosensors 2017 Conference, Paris, ...
متن کاملNew Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملQuartz Crystal Oscillators with Direct Resonator Heating
This paper describes a newly patented, low power, ovenized oscillator with the crystal heated directly by means of a thin film resistive heater deposited on its surface. Mounting the resonator inside an evacuated enclosure forms a miniature "thermos" bottle. The only significant path for heat loss is through the resonator mounting ribbons and posts and these, being long and thin, have quite hig...
متن کاملAbout Quartz Crystal Resonator Noise: Recent Study
The first step, before investigating physical origins of noise in resonators, is to investigate correlations between external measurement parameters and the resonator noise. Tests and measurements are mainly performed on an advanced phase noise measurement system, recently set up. The resonator noise is examined as a function of the sensitivity to the drive level, the temperature operating poin...
متن کاملOpto-acoustical filter based on phoxonic crystal ring resonator
In this paper, a phoxonic crystal structure is designed that shows a complete phononic and photonic ban gap and is capable to guide the optical waves with transverse magnetic polarization and acoustic waves. The materials used in the structure are nylon and molybdenum, which have suitable refractive index and elastic constant. Also, it is worth of noting that the filling factor is 28% for the p...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Proceedings
سال: 2017
ISSN: 2504-3900
DOI: 10.3390/proceedings1040379