Hexafluoroacetylacetonate Cu Vinylcyclohexane as a Liquid Precursor for Low-Temperature Chemical Vapor Deposition of Copper Thin Films
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ژورنال
عنوان ژورنال: Electrochemical and Solid-State Letters
سال: 1999
ISSN: 1099-0062
DOI: 10.1149/1.1390721