Green patents corralled

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An Aluminum Nitride (AlN) MEMS resonator technology has been developed, enabling massively parallel filter and oscillator arrays on a single chip. Low loss filter banks and resonator arrays covering the 10MHz10GHz frequency range have been demonstrated, as has monolithic integration with inductors and CMOS circuitry. The high level of integration enables miniature multi-band, spectrally-aware a...

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ژورنال

عنوان ژورنال: Nature

سال: 2010

ISSN: 0028-0836,1476-4687

DOI: 10.1038/465021a