Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations

نویسندگان
چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Simulation and Model Reduction Methodsfor an RF Plasma Glow Discharge

In this paper, we report on numerical solutions and model reduction results for a plasma glow discharge model with a radio frequency ionization source. A pseudospectral implementation of a global spectral method was found to give accurate simulation results that correctly reflected the expected physical behavior of an argon plasma under the simulated operating conditions. Numerical residual ana...

متن کامل

Emergence of the stochastic resonance in glow discharge plasma

Stochastic resonance (SR) has been studied experimentally in a glow discharge plasma. For the SR phenomena, it is observed that a superimposed subthreshold periodic signal can be recovered via stochastic modulations of the discharge voltage. In the present experiments, induction of SR is quantified using the absolute mean difference (AMD). Comparison of the AMD techniques with respect to cross-...

متن کامل

Bulk plasma properties in the pulsed glow discharge

This work focuses on the spatial and temporal characteristics of a glow discharge plasma operated with power pulses of 5 ms in duration at 25% duty cycle. Interpretation of emission data provides insight into the nature of the plasma at each instant of a typical pulse cycle and at each position in space. Because the bulk plasma properties affect the distribution of excited energy levels of the ...

متن کامل

Dust particle charging in DC glow discharge plasma

Dust particles charging in a stratified positive column of a low-pressure DC glow discharge was investigated theoretically. The presented model consists of (i) previously developed 1D selfconsistent model for discharge parameters on the tube axis; (ii) ambipolar approximation for radial electric potential distribution and the assumption that the electron energy distribution function in radial d...

متن کامل

The Role of Secondary Electrons in Low Pressure RF Glow Discharge

We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary el...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Meccanica

سال: 2010

ISSN: 0025-6455,1572-9648

DOI: 10.1007/s11012-010-9330-z