Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Meccanica
سال: 2010
ISSN: 0025-6455,1572-9648
DOI: 10.1007/s11012-010-9330-z