Fundamentals and Present Aspects of Ion Beam Technology. V. Application of Ion Beam. 3. Application of Industries. 3.3 Formation of thin films by low energy ion beam deposition.

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ژورنال

عنوان ژورنال: RADIOISOTOPES

سال: 1995

ISSN: 1884-4111,0033-8303

DOI: 10.3769/radioisotopes.44.9_667