Fully Integrated Micro Coriolis Mass Flow Sensor Operating at Atmospheric Pressure
نویسندگان
چکیده
منابع مشابه
Micro Coriolis Flow Sensor
In recent years, the interest in integrated microfluidic systems has been steadily growing. In these systems (for instance (bio)chemical and DNA analysis and synthesis devices), accurate dosing of liquids and/or gases is of great importance. To achieve this, accurate (mass) flow sensing is necessary. This project is dedicated to the development of a new micro Coriolis flow sensor. The inherent ...
متن کاملMicro Coriolis Mass Flow Sensor for Chemical Micropropulsion Systems
We have designed a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems [1]. The sensor measures mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterization of the micro thruster system in a simulated space v...
متن کاملA Compact Micro Coriolis Mass Flow Sensor with Flow Bypass for a Monopropellant Micro Propulsion System
We have designed, fabricated and tested a micromachined Coriolis flow sensor for the measurement of hydrazine (N2H4) propellant flow in a micro chemical propulsion system (μCPS). The sensor will be used for measurement and characterization of the μCPS in a simulated space vacuum environment. To reach the required flow range a bypass system is integrated. Initial measurements demonstrate an incr...
متن کاملA Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure
A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheri...
متن کاملMicro Coriolis Mass Flow Sensor with Extended Range for a Monopropellant Micro Propulsion System
We have designed and realised a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems. The sensor should be able to measure mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterisation of the micro thruster sys...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: teme
سال: 2012
ISSN: 2196-7113,0171-8096
DOI: 10.1524/teme.2012.0171